Applied Materials’ New eBeam Metrology System Paves the Way to High-NA EUV Lithography

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Go back to Applied Materials’ New eBeam Metrology System Paves the Way to High-NA EUV Lithography

Applied Materials (AMAT) announces new chip tool to streamline lithography process

February 28, 2023 12:08 PM EST

(Updated - February 28, 2023 12:19 PM EST)

Applied Materials (NASDAQ: AMAT) unveiled a new chip manufacturing tool on Tuesday specifically designed that can lower the lithography process cost.

The new eBeam metrology system measures the critical dimensions of semiconductor device features patterned with EUV and emerging High-NA EUV lithography.

Lithography prints a pattern on the wafer the shiny round discs used for chip-making using light. Applied Materials' new tool is said to reduce the time spent on lithography, which has become increasingly... More