Applied Materials (AMAT) announces new chip tool to streamline lithography process

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Applied Materials (AMAT) Gains, ASML Holdings (ASML) Declines After AMAT Unveils New Chipmaking Tool

February 28, 2023 9:38 AM EST

Applied Materials (NASDAQ: AMAT) Gains, ASML Holdings (NASDAQ: ASML) Declines After AMAT Unveils New Chipmaking Tool

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Applied Materials' (AMAT) New eBeam Metrology System Paves the Way to High-NA EUV Lithography

February 28, 2023 7:36 AM EST

Applied Materials, Inc. (Nasdaq: AMAT) today introduced a new eBeam metrology system specifically designed to precisely measure the critical dimensions of semiconductor device features patterned with EUV and emerging High-NA EUV lithography.

Chipmakers use CD-SEMs (critical dimension scanning electron microscopes) to take sub-nanometer measurements of patterns once a lithography scanner transfers them from a mask to a photoresist. These measurements continuously calibrate lithography process performance to ensure the patterns are correct before they are etched into the wafer. CD-SEMs are also used after etch to correlate intended patterns with on-wafer results.... More

Applied Materials unveils new chip tool to lower cost in lithography process

February 28, 2023 7:34 AM EST

By Jane Lanhee Lee

OAKLAND, Calif. (Reuters) - Silicon Valley-based Applied Materials Inc, among the most important makers of tools for chip manufacturing, said on Tuesday it has started selling a new tool that can lower the cost of a process involving lithography.

Lithography uses light to print a pattern on the wafer, the shiny round discs used for chip making. This process can happen dozens of times per wafer. Each time, the wafer goes through a complex process of depositing material,... More