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Mar 25, 2021 07:28PM Form 4 AMTECH SYSTEMS INC For: Mar 23 Filed by: GARNREITER MICHAEL

Mar 25, 2021 07:10PM Form 4 AMTECH SYSTEMS INC For: Mar 23 Filed by: Averick Robert M

Mar 25, 2021 06:54PM Form 4 AMTECH SYSTEMS INC For: Mar 23 Filed by: MOHAN SUKESH

Feb 18, 2021 05:24PM Form SC 13D/A AMTECH SYSTEMS INC Filed by: Harbert Discovery Fund, LP

Feb 12, 2021 03:56PM Form SC 13G/A AMTECH SYSTEMS INC Filed by: DIMENSIONAL FUND ADVISORS LP

Feb 11, 2021 04:24PM Form 10-Q AMTECH SYSTEMS INC For: Dec 31

Feb 11, 2021 04:18PM Form 8-K AMTECH SYSTEMS INC For: Feb 09

Feb 10, 2021 05:24PM Form SC 13G/A AMTECH SYSTEMS INC Filed by: Pacific Ridge Capital Partners, LLC

Feb 10, 2021 10:32AM Form SC 13G AMTECH SYSTEMS INC Filed by: VANGUARD GROUP INC

Jan 28, 2021 04:18PM Form DEF 14A AMTECH SYSTEMS INC For: Mar 23

Dec 17, 2020 04:11PM Form 8-K AMTECH SYSTEMS INC For: Dec 14

Dec 4, 2020 04:51PM Form 4 AMTECH SYSTEMS INC For: Dec 03 Filed by: KING ROBERT F

Nov 19, 2020 05:57PM Form 4 AMTECH SYSTEMS INC For: Nov 17 Filed by: GIBBS LISA

Nov 19, 2020 05:57PM Form 4 AMTECH SYSTEMS INC For: Nov 17 Filed by: WHANG MICHAEL

Nov 19, 2020 05:56PM Form 4 AMTECH SYSTEMS INC For: Nov 17 Filed by: WHANG JONG S

Nov 19, 2020 04:42PM Form 10-K AMTECH SYSTEMS INC For: Sep 30

Nov 19, 2020 04:21PM Form 8-K AMTECH SYSTEMS INC For: Nov 19

Sep 25, 2020 04:35PM Form 8-K AMTECH SYSTEMS INC For: Sep 23

Aug 12, 2020 04:04PM Form 4 AMTECH SYSTEMS INC For: Aug 10 Filed by: Averick Robert M

Aug 6, 2020 04:39PM Form 10-Q AMTECH SYSTEMS INC For: Jun 30

Aug 6, 2020 04:31PM Form 8-K AMTECH SYSTEMS INC For: Aug 06

May 29, 2020 04:07PM Form SD AMTECH SYSTEMS INC

May 7, 2020 04:38PM Form 8-K AMTECH SYSTEMS INC For: May 07

May 7, 2020 04:36PM Form 10-Q AMTECH SYSTEMS INC For: Mar 31

May 7, 2020 04:26PM Form 8-K AMTECH SYSTEMS INC For: May 04

Mar 16, 2020 05:03PM Form 4 AMTECH SYSTEMS INC For: Mar 13 Filed by: WHANG JONG S

Mar 12, 2020 04:18PM Form 4 AMTECH SYSTEMS INC For: Mar 10 Filed by: WHANG JONG S

Mar 5, 2020 04:55PM Form 4 AMTECH SYSTEMS INC For: Mar 04 Filed by: MOHAN SUKESH

Mar 5, 2020 04:53PM Form 4 AMTECH SYSTEMS INC For: Mar 04 Filed by: KING ROBERT F

Mar 5, 2020 04:51PM Form 4 AMTECH SYSTEMS INC For: Mar 04 Filed by: GARNREITER MICHAEL

Mar 5, 2020 04:07PM Form 4 AMTECH SYSTEMS INC For: Mar 04 Filed by: Averick Robert M

Mar 4, 2020 05:13PM Form 8-K AMTECH SYSTEMS INC For: Mar 04

Mar 3, 2020 04:45PM Form 4 AMTECH SYSTEMS INC For: Mar 02 Filed by: GIBBS LISA

Mar 3, 2020 04:44PM Form 4 AMTECH SYSTEMS INC For: Mar 02 Filed by: WHANG MICHAEL

Feb 27, 2020 04:02PM Form 4 AMTECH SYSTEMS INC For: Feb 25 Filed by: Averick Robert M

Feb 13, 2020 06:03AM Form SC 13G/A AMTECH SYSTEMS INC Filed by: Pacific Ridge Capital Partners, LLC

Feb 12, 2020 05:14PM Form SC 13G AMTECH SYSTEMS INC Filed by: Pacific Ridge Capital Partners, LLC

Feb 12, 2020 04:31PM Form 4 AMTECH SYSTEMS INC For: Feb 10 Filed by: Averick Robert M

Feb 12, 2020 10:27AM Form SC 13G/A AMTECH SYSTEMS INC Filed by: DIMENSIONAL FUND ADVISORS LP

Feb 6, 2020 04:28PM Form 10-Q AMTECH SYSTEMS INC For: Dec 31

Feb 6, 2020 04:18PM Form 8-K AMTECH SYSTEMS INC For: Feb 04

Feb 4, 2020 03:18PM Form SC 13G/A AMTECH SYSTEMS INC Filed by: ROYCE & ASSOCIATES LP

Jan 30, 2020 05:09PM Form SC 13D/A AMTECH SYSTEMS INC Filed by: Privet Fund LP

Jan 29, 2020 05:55AM Amtech Systems (ASYS) Reports Sale of Solar Business

Jan 28, 2020 04:55PM Form 8-K AMTECH SYSTEMS INC For: Jan 22

Jan 24, 2020 05:25PM Form DEF 14A AMTECH SYSTEMS INC For: Mar 04

Dec 11, 2019 06:02AM Form SC 13D AMTECH SYSTEMS INC Filed by: Harbert Discovery Fund, LP

Nov 25, 2019 09:01AM Form SC 13D AMTECH SYSTEMS INC Filed by: Privet Fund LP

Nov 22, 2019 04:22PM Form 8-K AMTECH SYSTEMS INC For: Nov 19

Nov 21, 2019 07:33AM Form 10-K AMTECH SYSTEMS INC For: Sep 30

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