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Mar 26, 2026 04:09PM Form SCHEDULE 13G/A AXCELIS TECHNOLOGIES Filed by: VANGUARD GROUP INC
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Oct 18, 2024 03:33PM Form SC 13G/A AXCELIS TECHNOLOGIES Filed by: BlackRock, Inc.
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Jan 26, 2023 08:53AM Form SC 13G/A AXCELIS TECHNOLOGIES Filed by: BlackRock Inc.
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Feb 8, 2022 04:00PM Form SC 13G/A AXCELIS TECHNOLOGIES Filed by: DIMENSIONAL FUND ADVISORS LP
Jan 28, 2022 01:58PM
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Jan 26, 2021 02:25PM Form SC 13G/A AXCELIS TECHNOLOGIES Filed by: BlackRock Inc.
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Feb 12, 2019 09:44AM Form SC 13G/A AXCELIS TECHNOLOGIES Filed by: WELLINGTON MANAGEMENT GROUP LLP
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Feb 13, 2018 04:47PM Form SC 13G AXCELIS TECHNOLOGIES Filed by: DONALD SMITH & CO., INC.
Feb 12, 2018 04:53PM

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