FSI International (FSII) Award Follow-on Order of ANTARES with Leading Global Device Manufacturer

March 1, 2012 3:08 PM EST
FSI International, Inc. (Nasdaq: FSII) announced that a leading global device producer has placed follow-on orders for its ANTARES CryoKinetic Cleaning System. The chip provider currently uses the ANTARES System for various particle removal processes and with these orders, is adding capacity for advanced technology generations. The systems are expected to ship in fiscal 2012.*

The ANTARESĀ® System is a fully automated, single-wafer, CryoKinetic system used for processing 200/300mm wafers with capabilities to remove nanoscale particles.


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