Axcelis qualifies ion implanter at semiconductor foundry for PMIC use
Axcelis Technologies (Nasdaq: ACLS) announced the successful evaluation closure of its Purion XEmax high energy ion implanter at an unidentified semiconductor foundry, according to a press release issued July 28, 2026.
The system was qualified for use in the production of Power Management Integrated Circuits (PMICs), a chip category used in devices ranging from smartphones to electric vehicles. The evaluation confirmed the system's capability to perform advanced implant processes at energies up to 15 MeV.
Russell Low, President and CEO of Axcelis, said the evaluation closure "highlights growing customer requirements for even higher energy implant recipes on advanced PMIC devices." He noted the Purion XEmax features a dual LINAC design with patented Boost Technology.
Axcelis did not identify the foundry involved in the evaluation.
The Purion XEmax is part of Axcelis' Purion XE Series of high energy ion implanters, which also includes the Purion XE, Purion EXE, Purion VXE, and Purion XE Power Series. The company is headquartered in Beverly, Massachusetts, and has operated in the semiconductor equipment sector for over 45 years.
