Axcelis to Participate in ASMC 2026
Axcelis technologists and collaborators will present during the technical forum on
- MUSIC to Reduce Defects and Improve Throughput on Implants for SiC MOSFETs
Presented by HC Jayashankar, ST Microelectronics
Coauthors:Bala Subbu ,Jaganathan Sampathkumar (ST Microelectronics);Leonard M. Rubin ,Wanchun Zhang , James Thomas,JunSheng Chan ,Dwight Roh ,Fulvio Mazzamuto (Axcelis Technologies)
- Analysis of Resistance Performance of High Dose Boron Doping
Presented by Bohesharvind N. Murthi, Infineon Technologies (Kulim) Pte. Ltd
Coauthors:Chea Hui Lee (Infineon Technologies);Hank Chen , WanChun Zhang ,Leonard M. Rubin (Axcelis Technologies)
Axcelis is also sponsoring ASMC's Opening Reception and the Women in Semiconductors (WiS) Conference, which is collocated with ASMC, on
"ASMC is an important forum for advancing manufacturing innovation," said
For more information on the event, visit the conference website at https://www.semi.org/en/connect/events/advanced-semiconductor-manufacturing-conference-asmc.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in
CONTACTS:
Investor Relations Contact:
Senior Vice President and Interim Chief Financial Officer
Telephone: (978) 787-2352
Email: [email protected]
Press/Media Relations Contact:
Senior Director, Corporate & Marketing Communications
Telephone: (978) 787-4266
Email: [email protected]
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SOURCE Axcelis Technologies, Inc.
