ASML Holdings (NASDAQ: ASML) reported Q1 EPS of EUR0.68, EUR0.22 better than the analyst estimate of EUR0.46. Revenue for the quarter came in at EUR1.43 billion versus the consensus estimate of EUR1.47 billion.

"Our first-quarter net sales and gross margin met our guidance. We expect our second-quarter net sales to increase substantially from the first quarter, as our leading-edge logic customers begin to ramp the 10 nanometer node. Simultaneously, we see continued investment in earlier nodes, notably in the 28 nanometer node," ASML President and Chief Executive Officer Peter Wennink said.

"We continued the rollout of our latest immersion lithography system, the TWINSCAN NXT:1980, with the systems being ramped into production, as well as of our newest metrology system, the YieldStar 350E.

"Our next-generation technology, Extreme Ultraviolet (EUV) lithography, is continuing to make progress to manufacturing readiness. In the past three months, we again demonstrated improved productivity and availability. Our customers presented a wealth of EUV results at the SPIE Advanced Lithography conference that demonstrated significant progress, and they indicated an increased confidence in EUV for manufacturing insertion," Wennink said.

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