Axcelis Technologies (NASDAQ: ACLS) reported Q1 EPS of $0.02, $0.02 better than the analyst estimate of $0.00. Revenue for the quarter came in at $73.2 million versus the consensus estimate of $66.4 million.

Axcelis Technologies sees FY2015 EPS of $0.02-$0.04, versus the consensus of $0.02. Axcelis Technologies sees FY2015 revenue of $69-74 million, versus the consensus of $65.56 million.

Chairman and CEO Mary Puma said, "During the first quarter execution across the business was solid. We made excellent progress toward our market share goals due to rising Purion platform sales, including both new penetrations and multiple follow on orders, and growth in the memory and non-leading edge foundry and logic segments. Looking ahead, our highly leveraged business model and differentiated product technology should enable us to deliver strong earnings and generate significant cash in 2015."

For earnings history and earnings-related data on Axcelis Technologies (ACLS) click here.