Axcelis Technologies (NASDAQ: ACLS) reported Q4 EPS of $0.00, $0.03 better than the analyst estimate of ($0.03). Revenue for the quarter came in at $62.5 million versus the consensus estimate of $51.6 million.

Chairman and CEO Mary Puma said, "In the fourth quarter, we exceeded company guidance and analyst consensus estimates. Significant revenue growth was driven by the rapid adoption of the Purion H™ high current implanter. We expect the continued momentum of the Purion H will drive an increase in system sales in the first quarter." She added, "The introduction of the Purion H high current implanter and the Purion M™ medium current implanter has opened an additional 85% of the market, giving Axcelis access to 100% of the nearly $1B ion implant market."

For earnings history and earnings-related data on Axcelis Technologies (ACLS) click here.