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Form 4 AXCELIS TECHNOLOGIES For: Feb 17 Filed by: Lawson Douglas A.

February 19, 2015 4:20 PM EST
FORM 4 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940
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OMB Number: 3235-0287
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 Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
1. Name and Address of Reporting Person *
Lawson Douglas A.
(Last) (First) (Middle)
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
(Street)
BEVERLY MA 01915
(City) (State) (Zip)
2. Issuer Name and Ticker or Trading Symbol
AXCELIS TECHNOLOGIES INC [ ACLS ] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
Director 10% Owner
X Officer (give title below) Other (specify below)
EVP, Corporate Mktg & Strategy
3. Date of Earliest Transaction (Month/Day/Year)
02/17/2015
4. If Amendment, Date of Original Filed (Month/Day/Year)
 6. Individual or Joint/Group Filing (Check Applicable Line)
X Form filed by One Reporting Person
Form filed by More than One Reporting Person
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3) 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code (Instr. 8) 4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5) 5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4) 6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 7. Nature of Indirect Beneficial Ownership (Instr. 4)
Code V Amount (A) or (D) Price
Common Stock 02/17/2015   M   7,088 A $ 1.6 22,186 D  
Common Stock 02/17/2015   M   18,750 A $ 1.99 40,936 D  
Common Stock 02/17/2015   S   3,188 D $ 2.8 37,748 D  
Common Stock 02/17/2015   S   3,900 D $ 2.81 33,848 D  
Common Stock 02/17/2015   S   15,250 D $ 2.76 18,598 D  
Common Stock 02/18/2015   M   57,912 A $ 1.6 76,510 D  
Common Stock 02/18/2015   S   21,687 D $ 2.7 54,823 D  
Common Stock 02/18/2015   S   6,700 D $ 2.72 48,123 D  
Common Stock 02/18/2015   S   11,504 D $ 2.73 36,619 D  
Common Stock 02/18/2015   S   13,596 D $ 2.74 23,023 D  
Common Stock 02/18/2015   S   1,825 D $ 2.75 21,198 D  
Common Stock 02/18/2015   S   2,500 D $ 2.76 18,698 D  
Common Stock 02/18/2015   S   100 D $ 2.77 18,598 D  
Common Stock               12,500 I Held by Spouse
Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3) 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code (Instr. 8) 5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5) 6. Date Exercisable and Expiration Date (Month/Day/Year) 7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4) 8. Price of Derivative Security (Instr. 5) 9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4) 10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 11. Nature of Indirect Beneficial Ownership (Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Stock Option (right to buy) $ 1.6 02/17/2015   M     7,088 07/15/2014 07/15/2020 Common Stock 7,088 $ 0 57,912 D  
Stock Option (right to buy) $ 1.99 02/17/2015   M     18,750 07/15/2014 (1) 07/15/2020 Common Stock 18,750 $ 0 56,250 D  
Stock Option (right to buy) $ 1.6 02/18/2015   M     57,912 07/15/2014 07/15/2020 Common Stock 57,912 $ 0 0 D  
Explanation of Responses:
1. These options are from an original grant of 75,000 shares, of which 25% were vested on 7/15/2014, and 25% will vest on each of 7/15/2015, 7/15/2016 and 7/15/2017.
Lynnette C. Fallon, as attorney in fact for Douglas A. Lawson 02/19/2015
** Signature of Reporting Person Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.

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