Form 10-Q AMTECH SYSTEMS INC For: Dec 31

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Item 1.	Condensed Consolidated Financial Statements

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1.	Summary of Significant Accounting Policies

1.

For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer’s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems. Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.

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2.

For products where the customer’s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results.

3.	Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.

4.	Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.

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(1)	Stock-based compensation expense is included in selling, general and administrative expenses.

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2.	Income Taxes

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3.	Earnings Per Share

(1)	The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

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5.	Business Segment Information

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Item 2.	MANAGEMENT’S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS

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•	Overview

•	Results of Operations

•	Liquidity and Capital Resources

•	Off – Balance Sheet Arrangements

•	Contractual Obligations

•	Critical Accounting Policies

•	Impact of Recently Issued Accounting Pronouncements

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Item 3.	QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

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Item 4.	CONTROLS AND PROCEDURES

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Item 1.	Legal Proceedings

Item 1A.	Risk Factors

Item 2.	Unregistered Sales of Equity Securities and Use of Proceeds

Item 3.	Defaults Upon Senior Securities

Item 4.	Mine Safety Disclosures

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Item 5.	Other Information

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Item 6.	Exhibits

*	Filed herewith.

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1.	I have reviewed this Quarterly Report on Form 10-Q of Amtech Systems, Inc. (the “registrant”),

2.	Based on my knowledge, this quarterly report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this quarterly report;

3.	Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this quarterly report;

4.	The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a)	Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

(b)	Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c)	Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d)	Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5.	The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a)	All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b)	Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

1.	I have reviewed this Quarterly Report on Form 10-Q of Amtech Systems, Inc. (the “registrant”),

2.	Based on my knowledge, this quarterly report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this quarterly report;

3.	Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this quarterly report;

4.	The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a)	Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

(b)	Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c)	Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d)	Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5.	The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a)	All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b)	Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

(1)	The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

(2)	The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

(1)	The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

(2)	The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

v3.3.1.900

Document and Entity Information - shares	3 Months Ended
	Dec. 31, 2015	Jan. 29, 2016
Document and Entity Information [Abstract]
Entity Registrant Name	AMTECH SYSTEMS INC
Entity Central Index Key	0000720500
Current Fiscal Year End Date	--09-30
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	Dec. 31, 2015
Document Fiscal Year Focus	2015
Document Fiscal Period Focus	Q1
Amendment Flag	false
Entity Common Stock, Shares Outstanding		13,167,509

v3.3.1.900

Condensed Consolidated Balance Sheets - USD ($) $ in Thousands	Dec. 31, 2015	Sep. 30, 2015
Current Assets
Cash and cash equivalents	$ 22,617	$ 25,852
Restricted cash	847	638
Accounts receivable
Trade (less allowance for doubtful accounts of $3,708 and $5,009 at December 31, 2015, and September 30, 2015, respectively)	16,063	14,488
Unbilled and other	7,084	8,494
Inventories	21,541	23,329
Deferred income taxes	2,050	2,050
Notes and other receivable	67	7,079
Other	6,117	3,772
Total current assets	76,386	85,702
Property, Plant and Equipment - Net	17,079	17,761
Deferred income taxes - Long Term	430	430
Other Assets - Long Term	1,145	3,356
Investments	2,716	2,733
Intangible Assets - Net	4,665	4,939
Goodwill	10,974	10,535
Total Assets	113,395	125,456
Current Liabilities
Accounts payable	10,582	15,646
Current maturities of long-term debt	822	919
Accrued compensation and related taxes	5,349	5,605
Accrued warranty expense	766	793
Deferred profit	4,679	4,873
Customer deposits	4,601	7,154
Other accrued liabilities	2,725	3,551
Income taxes payable	940	830
Total current liabilities	30,464	39,371
Long-term Debt	9,234	8,448
Income Taxes Payable - Long Term	5,690	4,990
Total liabilities	$ 45,388	$ 52,809
Commitments and Contingencies
Stockholders' Equity
Preferred stock; 100,000,000 shares authorized; none issued	$ 0	$ 0
Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 13,150,222 and 9,848,253 at June 30, 2015, and September 30, 2014, respectively	132	131
Additional paid-in capital	110,533	110,191
Accumulated other comprehensive loss	(9,201)	(8,666)
Retained deficit	(32,837)	(28,822)
Total stockholders' equity	68,627	72,834
Noncontrolling interest	(620)	(187)
Total equity	68,007	72,647
Total Liabilities and Stockholders' Equity	$ 113,395	$ 125,456

v3.3.1.900

Condensed Consolidated Balance Sheets (Parenthetical) - USD ($) $ in Thousands	Dec. 31, 2015	Sep. 30, 2015
Current Assets
Allowance for doubtful accounts	$ 3,708	$ 5,009
Stockholders' Equity
Common stock, par value	$ 0.01	$ 0.01
Common stock, shares authorized	100,000,000	100,000,000
Common stock, shares issued	13,164,009	13,150,469
Common stock, shares outstanding	13,164,009	13,150,469
Preferred stock, shares authorized	100,000,000	100,000,000
Preferred stock, shares issued	0	0

v3.3.1.900

Condensed Consolidated Statements of Operations (Unaudited) - USD ($) shares in Thousands, $ in Thousands	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Income Statement [Abstract]
Revenues, net of returns and allowances	$ 22,074	$ 12,396
Cost of sales	16,119	8,968
Gross profit	5,955	3,428
Selling, general and administrative	7,596	6,384
Research, development and engineering	2,288	1,837
Operating loss	(3,929)	(4,793)
Interest expense and other income, net	(219)	97
Loss before income taxes	(4,148)	(4,696)
Income tax provision	300	180
Net loss	(4,448)	(4,876)
Add: net loss (income) attributable to noncontrolling interest	433	(319)
Net loss attributable to Amtech Systems, Inc.	$ (4,015)	$ (5,195)
Loss Per Share:
Basic loss per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ (0.53)
Weighted average shares outstanding (in shares)	13,152	9,854
Diluted loss per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ (0.53)
Weighted average shares outstanding (in shares)	13,152	9,854

v3.3.1.900

Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited) - USD ($) $ in Thousands	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Statement of Comprehensive Income [Abstract]
Net loss	$ (4,448)	$ (4,876)
Foreign currency translation adjustment	(535)	(1,058)
Comprehensive loss	(4,983)	(5,934)
Comprehensive (income) loss attributable to noncontrolling interest	433	(313)
Comprehensive loss attributable to Amtech Systems, Inc.	$ (4,550)	$ (6,247)

v3.3.1.900

Condensed Consolidated Statements Of Cash Flows (Unaudited) - USD ($) $ in Thousands	3 Months Ended		12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Sep. 30, 2014
Operating Activities
Net loss	$ (4,448)	$ (4,876)
Adjustments to reconcile net loss to net cash provided by (used in) operating activities:
Depreciation and amortization	783	705
Write-down of inventory	39	35
Deferred income taxes	9	(4)
Non-cash share based compensation expense	342	232
Provision for (reversal of) allowance for doubtful accounts	(158)	44
Changes in operating assets and liabilities:
Restricted cash	(220)	(244)
Accounts receivable	(309)	2,371
Inventories	1,412	(535)
Accrued income taxes	212	172
Other assets	(167)	(722)
Accounts payable	(4,861)	(429)
Accrued liabilities and customer deposits	(3,354)	6,407
Deferred profit	(50)	(1,259)
Net cash (used in) provided by operating activities	(10,770)	1,897
Investing Activities
Purchases of property, plant and equipment	(108)	(155)
Acquisitions, net of cash acquired	0	(253)
Proceeds from partial sale of subsidiary	7,012		$ 0
Loss on equity investments	17		0
Net cash provided by (used in) investing activities	6,921	(408)
Financing Activities
Payments on long-term debt	(180)	0
Borrowings on long-term debt	830	0
Net cash provided by financing activities	650	0
Effect of Exchange Rate Changes on Cash	(36)	(302)
Net Increase (Decrease) in Cash and Cash Equivalents	(3,235)	1,187
Cash and Cash Equivalents, Beginning of Period	25,852	27,367
Cash and Cash Equivalents, End of Period	22,617	$ 28,554	27,367
Supplemental Cash Flow Information:
Cash paid for interest	$ 89		$ 0

v3.3.1.900

Basis of Presentation	3 Months Ended
	Dec. 31, 2015
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Basis of Presentation	Summary of Significant Accounting Policies   Nature of Operations and Basis of Presentation - Amtech Systems, Inc. (the “Company” or “Amtech”) is a global manufacturer of capital equipment, including thermal processing, silicon wafer handling automation, and related consumables used in fabricating solar cells, LED and semiconductor devices. The Company sells these products to solar cell and semiconductor manufacturers worldwide, particularly in Asia, United States and Europe.   The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company’s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends. The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the “SEC”), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K for the fiscal year ended September 30, 2015. The consolidated results of operations for the three months ended December 31, 2015, are not necessarily indicative of the results to be expected for the full fiscal year. Principles of Consolidation – The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company’s equity. The equity method of accounting is used for investments over which the Company has a significant influence but not a controlling financial interest. All material intercompany accounts and transactions have been eliminated in consolidation. Use of Estimates - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates. Revenue Recognition - The Company reviews product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. The Company recognizes revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller’s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:   1. For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer’s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems. Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services. Where the installation and acceptance of more than two similarly configured items of equipment have not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since the Company only defers those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, the policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve. 2. For products where the customer’s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results. 3. Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties. 4. Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer. Deferred Profit – Revenue deferred pursuant to the Company’s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:     December 31, 2015   September 30, 2015   (dollars in thousands) Deferred revenues $ 6,994   $ 7,280 Deferred costs 2,315   2,407 Deferred profit $ 4,679   $ 4,873 Cash Equivalents – The Company considers all highly liquid investments with a maturity of three months or less when purchased to be cash equivalents. Cash and cash equivalents consist of amounts invested in U.S. money market funds and various U.S. and foreign bank operating and time deposit accounts.   Restricted Cash – Restricted cash of $0.8 million and $0.6 million as of December 31, 2015, and September 30, 2015, respectively, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment. Restricted cash as of December 31, 2015 and September 30, 2015 includes $0.2 million relating the Company's proportional responsibility, assumed in connection with the BTU International Inc. (“BTU”) acquisition, for clean-up costs at a Superfund site. Accounts Receivable and Allowance for Doubtful Accounts – Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote. Accounts Receivable - Unbilled and Other – Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. Concentrations of Credit Risk – Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company’s customers consist of solar cell and semiconductor manufacturers worldwide, as well as the lapping and polishing marketplace. Credit risk is managed by performing ongoing credit evaluations of the customers’ financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.   The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States, which account for approximately 80% of the Company's total cash balances are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company’s cash is maintained with financial institutions with reputable credit in The Netherlands, France and China.   As of December 31, 2015 and September 30, 2015, no customer individually represented greater than 10% of accounts receivable.   Refer to Note 6 to Condensed Consolidated Financial Statements, Major Customers and Foreign Sales, for information regarding revenue and assets in other countries subject to fluctuation in foreign currency exchange rates.   Inventories – Inventories are stated at the lower of cost or net realizable value. Approximately 60% of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis. The components of inventories are as follows:     December 31, 2015   September 30, 2015   (dollars in thousands) Purchased parts and raw materials $ 10,950   $ 11,587 Work-in-process 4,314   5,089 Finished goods 6,277   6,653   $ 21,541   $ 23,329 Property, Plant and Equipment – Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings 20-30 years.   The following is a summary of property, plant and equipment:     December 31, 2015   September 30, 2015   (dollars in thousands) Land, building and leasehold improvements $ 17,904   $ 18,095 Equipment and machinery 9,564   9,709 Furniture and fixtures 5,325   5,465   32,793   33,269 Accumulated depreciation and amortization (15,714 )   (15,508 )   $ 17,079   $ 17,761 Goodwill - Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate.   The following is a summary of activity in goodwill:   Solar   Semiconductor   Polishing   Total   (dollars in thousands)    Goodwill $ 6,617   $ 4,463   $ 728   $ 11,808    Accumulated impairment losses (1,273 )   —   —   (1,273 ) Carrying value at September 30, 2015 5,344   4,463   728   10,535 Goodwill recognized due to acquisitions —   600   —   600 Net exchange differences (161 )   —   —   (161 ) Carrying value at December 31, 2015 $ 5,183   $ 5,063   $ 728   $ 10,974                    Goodwill $ 6,413   $ 5,063   $ 728   $ 12,204    Accumulated impairment losses (1,230 )   —   —   (1,230 ) Carrying value at December 31, 2015 $ 5,183   $ 5,063   $ 728   $ 10,974 Intangibles – Intangible assets are capitalized and amortized on a straight-line basis over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded. The following is a summary of intangibles:     Useful Life   Gross Carrying Amount Accumulated Amortization Net Carrying Amount   Gross Carrying Amount Accumulated Amortization Net Carrying Amount       December 31, 2015   September 30, 2015       (dollars in thousands) Non-compete agreements 4-8 years   $ 133 $ (133 ) $ —   $ 137 $ (137 ) $ — Customer lists 10 years   2,412 (776 ) 1,636   2,434 (808 ) 1,626 Technology 5-10 years   3,126 (1,526 ) 1,600   3,223 (1,368 ) 1,855 Trade names 10-15 years   1,449 (97 ) 1,352   1,456 (72 ) 1,384 Other 2-10 years   287 (210 ) 77   278 (204 ) 74       $ 7,407 $ (2,742 ) $ 4,665   $ 7,528 $ (2,589 ) $ 4,939 Long-lived assets - Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. Warranty – A limited warranty is provided free of charge, generally for periods of 12 to 24 months, for all purchases of the Company’s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. The following is a summary of activity in accrued warranty expense:     Three Months Ended December 31,   2015   2014   (dollars in thousands) Beginning balance $ 793   $ 628 Warranty expenditures (22 )   (228 ) Warranty provisions/(adjustment) (5 )   307 Ending balance $ 766   $ 707   Stock-Based Compensation - The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities rather than as cash flow from operating activities. Stock-based compensation expense reduced the Company’s results of operations by the following amounts:     Three Months Ended December 31,   2015   2014   (dollars in thousands) Effect on income before income taxes (1) $ (342 )   $ (232 ) Effect on income taxes 48   36 Effect on net income $ (294 )   $ (196 )   (1) Stock-based compensation expense is included in selling, general and administrative expenses. Stock options issued under the terms of the Company's option plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the NASDAQ the day prior to the date of the option grant and expire no later than 10 years from the date of grant, with the most recent grant expiring in 2025. Options issued by the Company generally vest over six months to four years, subject to the Company's board of directors' discretion.   Stock option transactions and the options outstanding are summarized as follows:     Three months ended December 31,   2015   2014   Options   Weighted Average Exercise Price   Options   Weighted Average Exercise Price Outstanding at beginning of period 1,627,477   $ 9.11   1,063,324   $ 7.37 Granted 344,075   5.25   282,500   9.98 Exercised —   —   —   — Forfeited (33,642 )   14.90   —   — Outstanding at end of period 1,937,910   $ 8.34   1,345,824   $ 7.91                 Exercisable at end of period 1,189,855   $ 9.21   802,703   $ 7.81 Weighted average fair value of options granted during the period $ 3.03       $ 6.09     The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:     Three months ended December 31,   2015   2014 Risk free interest rate 2%   2% Expected life 6 years   6 years Dividend rate 0%   0% Volatility 62%   67% To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.   The Company awards restricted shares under the existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two- to four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The “service period” is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.   Restricted stock transactions and awards outstanding are summarized as follows:     Three months ended December 31,   2015   2014   Awards   Weighted Average Grant Date Fair Value   Awards   Weighted Average Grant Date Fair Value Beginning Outstanding 13,540   $ 7.98   35,203   $ 10.13 Released (13,540 )   7.98   (21,663 )   11.47 Ending Outstanding —   $ —   13,540   $ 7.98  Fair Value of Financial Instruments In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board (“FASB”) Accounting Standards Codification (“ASC”), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are: Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets. Level 2 - Valuation is based upon quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market. Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.  In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values. Cash, Cash Equivalents and Restricted Cash - Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets are money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury and foreign bank operating and time deposit accounts. The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.  Receivables and Payables -The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments. If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy. Debt - The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.  Pensions - The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company’s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition. The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches employee funds on a discretionary basis.   Shipping expense – Shipping expenses of $0.4 million and $0.2 million for the three months ended December 31, 2015 and 2014, respectively, are included in selling, general and administrative expenses. Research, development and engineering expense – Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. The table below shows gross research and development expenses and grants earned:     Three Months Ended   December 31, 2015   December 31, 2014   (dollars in thousands) Research, development and engineering $ 2,615   $ 2,573 Grants earned (327 )   (736 )     Net research, development and engineering $ 2,288   $ 1,837 Impact of Recently Issued Accounting Pronouncements  In January 2016, the FASB issued Accounting Standards Update (“ASU”) No. 2016-01, Financial Instruments - Overall (Subtopic 825-10), Recognition and Measurement of Financial Assets and Financial Liabilities, which addresses certain aspects of recognition, measurement, presentation, and disclosure of financial instruments. This ASU is effective for fiscal years beginning after December 15, 2017 and early adoption is not permitted. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements. In November 2015, the FASB issued ASU No. 2015-17, Balance Sheet Classification of Deferred Taxes. This ASU requires entities to classify deferred tax liabilities and assets as noncurrent in a classified statement of financial position. This ASU is effective for fiscal years beginning after December 15, 2016, and interim periods within those annual periods. Early adoption is permitted for all entities as of the beginning of an interim or annual reporting period. The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements. In July 2015, the FASB issued ASU No. 2015-16, Business Combinations (Topic 805): Simplifying the Accounting for Measurement-Period Adjustments, which simplifies the accounting for measurement-period adjustments to provisional amounts recognized in a business combination. ASU 2015-16 is effective for fiscal years (and interim reporting periods within those years) beginning after December 15, 2016. The provisions of ASU 2015-16 are not expected to have a material effect on the Company's financial condition, results of operations, or cash flows. In July 2015, the FASB issued ASU No. 2015-11, Simplifying the Measurement of Inventory. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. The Company does not expect adoption of this ASU to have a material impact on the Company's consolidated financial position and results of operations. In April 2015, the FASB issued ASU No. 2015-3, Interest-Imputation of Interest (Subtopic 835-30). This ASU requires debt issuance costs related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of the related debt liability instead of being presented as an asset. The ASU requires retrospective application and represents a change in accounting principle. The ASU is effective for fiscal years beginning after December 15, 2015. Early adoption is permitted for financial statements that have not been previously issued. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements. In January 2015, the FASB issued ASU No. 2015-1, Income Statement - Extraordinary and Unusual Items (Subtopic 225-20). The FASB issued this ASU as part of its initiative to reduce costs and complexity in accounting standards, known as its Simplification Initiative. This ASU eliminates from generally accepted accounting principles in the United States the concept of extraordinary items in an effort to save time and reduce costs, while alleviating uncertainty and maintaining accurate and fulsome disclosure. The amendments in this ASU are effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015. The Company is currently assessing the impact of this ASU but does not expect it to have a material impact on its consolidated financial position and results of operations.   In June 2014, the FASB issued ASU No. 2014-12 which provides guidance on how to account for share-based payment awards where the terms of the award provide that a performance target that affects vesting could be achieved after the requisite service period. This ASU requires a performance target that affects vesting and that could be achieved after the requisite service period be treated as a performance condition. This ASU is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2015, and early adoption is permitted. The Company is currently assessing the impact of this ASU but does not expect it to have a material impact on its consolidated financial position and results of operations. In May 2014, the FASB issued ASU No. 2014-09, Revenue from Contracts with Customers, which supersedes most of the current revenue recognition requirements. The core principle of the new guidance is that an entity should recognize revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for these goods or services. New disclosures about the nature, amount, timing and uncertainty of revenue and cash flows arising from contracts with customers are also required. This guidance is effective for the Company in the first quarter of fiscal year 2018 and early application is not permitted. Entities must adopt the new guidance using one of two retrospective application methods. The Company is currently evaluating the standard and the impact on its financial position and results of operations.

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Income Taxes	3 Months Ended
	Dec. 31, 2015
Income Tax Disclosure [Abstract]
Income Taxes	Income Taxes The quarterly income tax provision is calculated using an estimated annual effective tax rate, based upon expected annual income, permanent items, statutory rates and planned tax strategies in the various jurisdictions in which the Company operates. However, losses in certain jurisdictions and discrete items are treated separately. Deferred tax assets and liabilities reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The Company records a valuation allowance if, based on the weight of available evidence, it is more likely than not that some portion or all of a deferred tax asset will not be realized. Our expectations regarding realization of our deferred tax assets is based upon the weight of all available evidence, including such factors as our recent earnings history, expected future taxable income and available tax planning strategies. The Company maintains a valuation allowance with respect to certain state, federal and foreign deferred tax assets that may not be recovered. Each quarter, the valuation allowance is re-evaluated. During the three months ended December 31, 2015 the valuation allowance increased by $0.7 million due to net operating losses in The Netherlands and China. The Company classifies all of our uncertain tax positions as non-current income taxes payable. At December 31, 2015 and September 30, 2015, the total amount of unrecognized tax benefits was approximately $1.8 million. If recognized, these amounts would favorably impact the effective tax rate. Income taxes payable long-term primarily includes, among other items, withholding taxes that are not due until the related intercompany service fees are paid. The Company classifies interest and penalties related to unrecognized tax benefits as income tax expense. As of December 31, 2015 and September 30, 2015, the Company had an accrual for potential interest and penalties of approximately $1.9 million and $1.8 million, respectively. The Company and one or more of its subsidiaries file income tax returns in The Netherlands, France, China, Singapore, Malaysia, Hong Kong, and Germany, as well as the U.S. and various states in the U.S. The Company and its subsidiaries have a number of open tax years dictated by statute in each of their respective taxing jurisdictions, but generally is from 3 to 5 years.

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Earnings Per Share	3 Months Ended
	Dec. 31, 2015
Earnings Per Share [Abstract]
Earnings Per Share	Earnings Per Share   Basic earnings per share ("EPS") is computed by dividing net income (loss) by the weighted average number of common shares outstanding for the period. Diluted EPS is computed similarly to basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued. In the case of a net loss, diluted earnings per share is calculated in the same manner as basic EPS.   For the three months ended December 31, 2015, options for 1,938,000 shares are excluded from the diluted EPS calculations because they are anti-dilutive. For the three months ended December 31, 2014, options for 1,346,000 shares and 14,000 restricted stock awards were excluded from the diluted EPS calculations because they were anti-dilutive. The following table outlines basic and diluted EPS:   Three Months Ended December 31,   2015   2014   (in thousands, except per share amounts) Basic Loss Per Share Computation       Net loss attributable to Amtech Systems, Inc. $ (4,015 )   $ (5,195 ) Weighted Average Shares Outstanding:       Common stock 13,152   9,854 Basic loss per share attributable to Amtech shareholders $ (0.31 )   $ (0.53 ) Diluted Loss Per Share Computation       Net loss attributable to Amtech Systems, Inc. $ (4,015 )   $ (5,195 ) Weighted Average Shares Outstanding:       Common stock 13,152   9,854 Common stock equivalents (1) —   — Diluted shares 13,152   9,854 Diluted loss per share attributable to Amtech shareholders $ (0.31 )   $ (0.53 ) (1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

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Stockholders' Equity	3 Months Ended
	Dec. 31, 2015
Stockholders' Equity Note [Abstract]
Stockholders' Equity	Stockholders' Equity Shareholder Rights Plan - On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the “Rights Agent”), entered into an Amended and Restated Rights Agreement (the “Restated Rights Agreement”) which amended and restated the terms governing the previously authorized shareholder rights (each a “Right”) to purchase fractional shares of the Company’s Series A Participating Preferred Stock (“Series A Preferred”) currently attached to each of the Company’s outstanding Common Shares, par value $0.01 per share (“Common Shares”). As amended, each Right entitles the registered holder to purchase from the Company one one-thousandth of a share of Series A Preferred at an exercise price of $51.60 (the “Exercise Price”), subject to adjustment. The Rights will expire 10 years after issuance and will be exercisable if (a) a person or group becomes the beneficial owner of 15% or more of the Company’s common stock or (b) a person or group commences a tender or exchange offer that would result in the offeror beneficially owning 15% or more of the Company’s common stock.  The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018. On October 1, 2015, the Company entered into a Second Amended and Restated Rights Agreement (the “Second Restated Rights Agreement”) with Computershare Trust Company, N.A., which expands the definition of Exempted Person to include any person that the Board, in its sole and absolute discretion, exempts from becoming an Acquiring Person under the Second Restated Rights Agreement. A Person deemed an Exempted Person under the Second Restated Rights Agreement cannot trigger any of the Rights provided therein so long as such Exempted Person complies with the terms and conditions by which the Board approved such exemption from the Restated Rights Agreement. As previously disclosed, on October 8, 2015, the Company entered into a Letter Agreement (the “Agreement”) by and between the Company and certain shareholders of the Company who jointly file (the “Joint Filers”) under Section 13 of the Securities Exchange Act of 1934, as amended (the “Exchange Act”). The Agreement permits the Joint Filers, pursuant to the Restated Rights Agreement, to individually acquire shares of common stock of the Company that would, in the aggregate, bring the Joint Filers’ collective ownership to no more than 19.9% of the Company’s issued and outstanding common stock at any time. In the event the Joint Filers’ collective ownership at any time exceeds 19.9% of the Company’s issued and outstanding shares of common stock, the Company is entitled to specific performance and all other remedies entitled to the Company at law or equity, among others. The Company’s board of directors approved the Agreement and transactions contemplated thereunder, and has the sole authority to terminate the Agreement at any time.

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Business Segment Information	3 Months Ended
	Dec. 31, 2015
Segment Reporting [Abstract]
Business Segment Information	Business Segment Information   Following the Company’s acquisition of BTU, an evaluation was conducted of the Company’s organizational structure. Beginning with the second quarter of fiscal 2015, the Company made changes to its reportable segments. Prior period amounts have been revised to conform to the current period segment reporting structure. The Company’s three reportable segments are as follows: Solar - The Company is a leading supplier of thermal processing systems, including related automation, parts and services, to the solar/photovoltaic industry and also offers PECVD (plasma-enhanced chemical vapor deposition) equipment to the global solar market. Semiconductor - In the Company’s Semiconductor segment, it designs, manufactures, sells and services thermal processing equipment and related controls for use by leading semiconductor manufacturers, and in electronics, automotive and other industries. Polishing - In the Company's Polishing segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components. On December 24, 2014, the Company acquired a 51% controlling interest in SoLayTec, and on January 30, 2015, the Company completed its acquisition of BTU. Beginning in the second quarter of 2015, SoLayTec’s business is included in the results for the solar segment, and BTU’s business is included in the results for the semiconductor segment. See Note 10, “Acquisitions”, for additional information with respect to the Company’s acquisitions. Information concerning our business segments is as follows:   Three months ended December 31,   2015   2014   (dollars in thousands) Net Revenues:       Solar (1)* $ 9,543   $ 8,286 Semiconductor 10,700   732 Polishing 1,831   3,378   $ 22,074   $ 12,396 Operating income (loss):       Solar (1)* $ (1,864 )   $ (2,495 ) Semiconductor (160 )   (100 ) Polishing 169   742 Non-segment related (2,074 )   (2,940 )   $ (3,929 )   $ (4,793 ) (1) * The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than 25% of the Solar segment revenue.   December 31, 2015   September 30, 2015   (dollars in thousands) Identifiable Assets:       Solar $ 40,229   $ 45,717 Semiconductor 46,303   46,912 Polishing 5,395   5,793 Non-segment related 21,468   27,034   $ 113,395   $ 125,456

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Major Customers and Foreign Sales	3 Months Ended
	Dec. 31, 2015
Major Customers and Foreign Sales [Abstract]
Major Customers And Foreign Sales	Major Customers and Foreign Sales   During the three months ended December 31, 2015, one customer individually represented 14% of net revenues. During the three months ended December 31, 2014, two customers individually represented 12% and 11% of net revenues, respectively.   The Company has operations in The Netherlands, United States, France, and China. Our net revenues were to customers in the following geographic regions:     Three months ended December 31,   2015   2014 United States 28 %   23 % Other 3 %   — % Total North America 31 %   23 %         China 20 %   26 % Taiwan 13 %   19 % Other 21 %   6 % Total Asia 54 %   51 % Germany 2 %   10 % Other 13 %   16 % Total Europe 15 %   26 %   100 %   100 %

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Long-term Debt	3 Months Ended
	Dec. 31, 2015
Debt Disclosure [Abstract]
Long-term Debt	Long-term Debt In January 2015, the Company acquired $7.2 million of long-term debt as part of the BTU acquisition. The debt acquired is a mortgage note secured by its real property in Billerica, Massachusetts, and has a remaining balance of $6.8 million as of December 31, 2015. The debt acquired has an interest rate of 4.4% through September 26, 2018, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus two hundred forty basis points. The loan agreement requires compliance with certain covenants. One covenant requires that the outstanding principal plus accrued interest and fees thereon not be greater than 80% of the appraised value of the mortgaged premises. The Company was not in compliance with this covenant as of December 31, 2015. As of the date hereof, the Company has not received any notice of acceleration from the lender, nor has the Company received a waiver. Due to non-compliance, the Company has reclassified $0.1 million to current liabilities. The maturity date of the debt acquired is September 26, 2023. In December 2014, the Company acquired long-term debt as part of the SoLayTec B.V. (“SoLayTec”) acquisition. SoLayTec borrowed additional funds during the three months ended December 31, 2015 of $0.8 million. As of December 31, 2015 the SoLayTec long-term debt has a remaining balance of $3.2 million. The debt acquired has interest rates ranging from 5.95% to 10% and maturity dates ranging from fiscal 2017 to fiscal 2021.

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Commitments and Contingencies	3 Months Ended
	Dec. 31, 2015
Commitments and Contingencies Disclosure [Abstract]
Commitments and Contingencies	Commitments and Contingencies   Purchase Obligations – As of December 31, 2015 the Company had purchase obligations in the amount of $7.2 million compared to $9.8 million as of September 30, 2015. These purchase obligations consist of outstanding purchase orders for goods and services. While the amount represents purchase agreements, the actual amounts to be paid may be less if any agreements are renegotiated, canceled or terminated. Development projects – In fiscal 2014, Tempress Systems, Inc. ("Tempress") entered into an agreement with the Energy Research Centre of the Netherlands ("ECN"), a Netherlands government sponsored research institute, for a joint research and development project. Under the terms of the agreement, Tempress sold an ion implanter ("Equipment") to ECN for $1.4 million. Both Tempress and ECN are performing research and development projects utilizing the Equipment at the ECN facilities. Each party to the agreement will have 100% rights to the results of the projects developed separately by the individual parties. Any results co-developed will be jointly owned. Over the four-year period of the agreement, Tempress is required to contribute $1.4 million to the project in the form of installation of the equipment, acceptance testing, project meeting attendance, training, parts, and service, including keeping the equipment in good condition and repair for the first two years of the agreement. As of December 31, 2015, Tempress has contributed $0.9 million of the required $1.4 million to the project. EPA Accrual - As a result of the BTU acquisition, the Company assumed BTU’s proportional responsibility for clean-up costs at a Superfund site. As an equipment manufacturer, BTU generated and disposed of small quantities of solid waste that were considered hazardous under Environment Protection Agency (“EPA”) regulations. Because BTU historically used a waste disposal firm that disposed of the solid waste at a site that the EPA designated as a Superfund site, BTU was named by the EPA as one of the entities responsible for a portion of the expected clean-up costs. Based on the Company's proportional responsibility, as negotiated with and agreed to by the EPA, the Company's liability related to this matter is less than $0.1 million, which is included in Other Accrued Liabilities on the Condensed Consolidated Balance Sheet as of December 31, 2015. In 2009, in accordance with the agreement, the Company established a letter of credit for $0.2 million to the benefit of the EPA for potential cash payments as settlements for the Company’s proportional liability. Legal Proceedings – The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. As previously disclosed in the Company’s filings with the SEC, shortly after the Company entered into the merger agreement with BTU, two separate putative stockholder class action complaints (together, the "Stockholder Actions") were filed in the Court of Chancery of the State of Delaware (the "Delaware Court"). The first was filed on November 4, 2014 and the second on November 17, 2014, on behalf of BTU’s public stockholders, against BTU, members of the BTU board, Amtech and the special purpose merger subsidiary. The Stockholder Actions were consolidated on December 4, 2014. The complaints generally alleged that, in connection with entering into the merger agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders. The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages. On January 16, 2015, the Company and BTU, along with the other defendants named therein, entered into a memorandum of understanding (the “MOU”) to settle the Stockholder Actions. Pursuant to the MOU, the parties to the Stockholder Actions agreed to resolve the claims alleged and the Company and BTU agreed to make certain additional disclosures regarding the merger. On June 22, 2015, the Company and BTU, along with the other defendants named therein, filed a Stipulation and Agreement of Compromise and Settlement with the Delaware Court to memorialize the MOU. On November 6, 2015, the Company and BTU, along with the other defendants named therein, filed an Amended Stipulation and Agreement of Compromise and Settlement (the "Amended Stipulation of Settlement") with the Delaware Court. The Amended Stipulation of Settlement provides for a release of all alleged claims against the Company and BTU, along with the other defendants named therein, subject to an exception for certain securities law claims. In addition, the Amended Stipulation of Settlement provides that BTU, its insurer(s), or its successor(s) in interest will be responsible for the payment of certain amounts in plaintiffs’ attorney fees and expenses in connection with the settlement, and that the defendants in the Stockholder Actions agree not to oppose an application to the Delaware Court for fees and expenses not to exceed $325,000. In an effort to bring the Amended Stipulation of Settlement into conformity with recent rulings by the Delaware Court, the parties to the Stockholder Actions modified the Order and Final Judgment (the “Order”) to be approved by the Delaware Court. In amending the Order, the parties modified the definition of “Released Claims” by limiting the Released Claims solely to claims related to any disclosures (or lack thereof) to BTU’s stockholders concerning the merger and any fiduciary claims concerning the decision to enter into the merger. The modified Order further narrowed the definition of Released Claims by removing the inclusion of “Unknown Claims” from the definition of the Released Claims. The Amended Stipulation of Settlement and Order are subject to court approval. The Company and BTU entered into the Amended Stipulation of Settlement solely to avoid the costs, risks, and uncertainties inherent in litigation and without admitting any liability or wrongdoing. There can be no assurance that the court will approve the Amended Stipulation of Settlement or the Order, as amended. In such event, the proposed settlement as contemplated by the Amended Stipulation of Settlement may be terminated. These Stockholder Actions may cause the company to incur substantial costs and divert management’s attention from operational matters. Additionally, no outcome is certain, so additional harm could potentially result to the Company from this litigation.

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Investments	3 Months Ended
	Dec. 31, 2015
Equity Method Investments and Joint Ventures [Abstract]
Investments	The Company’s equity method investments include a 15% interest in Kingstone Technology Hong Kong Limited (“Kingstone”), which is effectively a 10% beneficial ownership in the Shanghai operating entity Shanghai Kingstone Semiconductor Company, Ltd. The Company recognizes it's portion of net income or losses on a one-quarter lag. At December 31, 2015, the carrying value of the equity method investment in Kingstone was $2.7 million. For the quarter ended December 31, 2015, Kingstone's equity losses were less than $0.1 million and have been included in our condensed consolidated statements of operations in interest expense and other income, net.

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Acquisitions	3 Months Ended
	Dec. 31, 2015
Business Combinations [Abstract]
Acquisitions	Acquisitions SoLayTec On December 24, 2014, the Company expanded its participation in the solar market by acquiring a 51% controlling interest in SoLayTec, which provides atomic layer deposition systems used in high efficiency solar cells, for a total purchase price consideration of $1.9 million. In connection with this acquisition, the Company recorded $3.2 million in goodwill and $2.0 million in identifiable intangible assets. BTU On January 30, 2015, the Company completed its acquisition of BTU (the "Merger"). In connection with the Merger, each share of BTU common stock outstanding immediately prior to the effective time of the Merger, including BTU restricted stock units that vested immediately prior to the effective time of the Merger, was converted to 0.3291 shares of common stock of the Company. The Company issued 3,185,852 shares of Company common stock on the Merger date. Pursuant to the terms of the merger agreement, options to purchase BTU common stock held by BTU employees were assumed by the Company and converted into options to purchase shares of Company common stock on substantially the same terms and conditions as were applicable to such BTU stock options, with appropriate adjustments based upon the exchange ratio of 0.3291 to the exercise price and the number of shares of Company common stock subject to such stock option. As a result of the Merger, the company owns 100% of the outstanding stock of BTU. In connection with this acquisition, we recorded $5.1 million in goodwill and $2.9 million in identifiable intangible assets.

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Related Party Transactions	3 Months Ended
	Dec. 31, 2015
Related Party Transactions [Abstract]
Related Party Transactions	Related Party Transactions In the fourth quarter of 2015, the Company deconsolidated Kingstone, reducing its ownership to 15% of the Hong Kong holding company (effectively a 10% beneficial ownership in the Shanghai operating entity). Upon the deconsolidation, Kingstone became a related party of the Company. Based on the terms of the transaction agreements, the Company expects to receive payment from Kingstone for its exclusive sale and service rights in the solar ion implant equipment. At December 31, 2015 the value of the sale and service rights has a carrying value of $2.2 million and is included in Other in current assets on the Condensed Consolidated Balance Sheets. Upon receipt of the payment, the Company will continue to have non-exclusive sales and service rights for these products. At December 31, 2015, the Company's related accounts receivable owing from Kingstone were $0.5 million, which are included in Accounts Receivable on the Condensed Consolidated Balance Sheet.

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Basis of Presentation (Policies)	3 Months Ended
	Dec. 31, 2015
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Nature of Operations and Basis of Presentation	Nature of Operations and Basis of Presentation - Amtech Systems, Inc. (the “Company” or “Amtech”) is a global manufacturer of capital equipment, including thermal processing, silicon wafer handling automation, and related consumables used in fabricating solar cells, LED and semiconductor devices. The Company sells these products to solar cell and semiconductor manufacturers worldwide, particularly in Asia, United States and Europe.   The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company’s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends. The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the “SEC”), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K for the fiscal year ended September 30, 2015. The consolidated results of operations for the three months ended December 31, 2015, are not necessarily indicative of the results to be expected for the full fiscal year.
Principles of Consolidation	Principles of Consolidation – The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company’s equity. The equity method of accounting is used for investments over which the Company has a significant influence but not a controlling financial interest. All material intercompany accounts and transactions have been eliminated in consolidation.
Use of Estimates	Use of Estimates - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.
Revenue Recognition	Revenue Recognition - The Company reviews product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. The Company recognizes revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller’s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:   1. For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer’s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems. Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services. Where the installation and acceptance of more than two similarly configured items of equipment have not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since the Company only defers those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, the policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve. 2. For products where the customer’s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results. 3. Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties. 4. Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.
Deferred Profit	Deferred Profit – Revenue deferred pursuant to the Company’s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities.
Cash Equivalents	Cash Equivalents – The Company considers all highly liquid investments with a maturity of three months or less when purchased to be cash equivalents. Cash and cash equivalents consist of amounts invested in U.S. money market funds and various U.S. and foreign bank operating and time deposit accounts.
Restricted Cash	Restricted Cash – Restricted cash of $0.8 million and $0.6 million as of December 31, 2015, and September 30, 2015, respectively, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment. Restricted cash as of December 31, 2015 and September 30, 2015 includes $0.2 million relating the Company's proportional responsibility, assumed in connection with the BTU International Inc. (“BTU”) acquisition, for clean-up costs at a Superfund site.
Accounts Receivable - Unbilled and Other	Accounts Receivable - Unbilled and Other – Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance.
Concentrations of Credit Risk	Concentrations of Credit Risk – Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company’s customers consist of solar cell and semiconductor manufacturers worldwide, as well as the lapping and polishing marketplace. Credit risk is managed by performing ongoing credit evaluations of the customers’ financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.   The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States, which account for approximately 80% of the Company's total cash balances are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company’s cash is maintained with financial institutions with reputable credit in The Netherlands, France and China.
Inventories	Inventories – Inventories are stated at the lower of cost or net realizable value. Approximately 60% of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis
Property, Plant and Equipment	Property, Plant and Equipment – Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings 20-30 years.
Goodwill	Goodwill - Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate.
Intangibles	Intangibles –
Long-lived assets	Long-lived assets - Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.
Warranty	Warranty – A limited warranty is provided free of charge, generally for periods of 12 to 24 months, for all purchases of the Company’s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized.
Stock-Based Compensation	Stock-Based Compensation - The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities rather than as cash flow from operating activities. Stock-based compensation expense reduced the Company’s results of operations by the following amounts:     Three Months Ended December 31,   2015   2014   (dollars in thousands) Effect on income before income taxes (1) $ (342 )   $ (232 ) Effect on income taxes 48   36 Effect on net income $ (294 )   $ (196 )   (1) Stock-based compensation expense is included in selling, general and administrative expenses. Stock options issued under the terms of the Company's option plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the NASDAQ the day prior to the date of the option grant and expire no later than 10 years from the date of grant, with the most recent grant expiring in 2025. Options issued by the Company generally vest over six months to four years, subject to the Company's board of directors' discretion.   Stock option transactions and the options outstanding are summarized as follows:     Three months ended December 31,   2015   2014   Options   Weighted Average Exercise Price   Options   Weighted Average Exercise Price Outstanding at beginning of period 1,627,477   $ 9.11   1,063,324   $ 7.37 Granted 344,075   5.25   282,500   9.98 Exercised —   —   —   — Forfeited (33,642 )   14.90   —   — Outstanding at end of period 1,937,910   $ 8.34   1,345,824   $ 7.91                 Exercisable at end of period 1,189,855   $ 9.21   802,703   $ 7.81 Weighted average fair value of options granted during the period $ 3.03       $ 6.09     The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:     Three months ended December 31,   2015   2014 Risk free interest rate 2%   2% Expected life 6 years   6 years Dividend rate 0%   0% Volatility 62%   67% To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.   The Company awards restricted shares under the existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two- to four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The “service period” is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.
Fair Value of Financial Instruments	Fair Value of Financial Instruments In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board (“FASB”) Accounting Standards Codification (“ASC”), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are: Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets. Level 2 - Valuation is based upon quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market. Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.  In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values. Cash, Cash Equivalents and Restricted Cash - Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets are money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury and foreign bank operating and time deposit accounts. The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.  Receivables and Payables -The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments. If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy. Debt - The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.
Pensions	Pensions - The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company’s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition. The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches employee funds on a discretionary basis.
Shipping expense	Shipping expense – Shipping expenses of $0.4 million and $0.2 million for the three months ended December 31, 2015 and 2014, respectively, are included in selling, general and administrative expenses.
Research and development expense	Research, development and engineering expense – Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met.
Impact of Recently Issued Accounting Pronouncements	Impact of Recently Issued Accounting Pronouncements  In January 2016, the FASB issued Accounting Standards Update (“ASU”) No. 2016-01, Financial Instruments - Overall (Subtopic 825-10), Recognition and Measurement of Financial Assets and Financial Liabilities, which addresses certain aspects of recognition, measurement, presentation, and disclosure of financial instruments. This ASU is effective for fiscal years beginning after December 15, 2017 and early adoption is not permitted. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements. In November 2015, the FASB issued ASU No. 2015-17, Balance Sheet Classification of Deferred Taxes. This ASU requires entities to classify deferred tax liabilities and assets as noncurrent in a classified statement of financial position. This ASU is effective for fiscal years beginning after December 15, 2016, and interim periods within those annual periods. Early adoption is permitted for all entities as of the beginning of an interim or annual reporting period. The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements. In July 2015, the FASB issued ASU No. 2015-16, Business Combinations (Topic 805): Simplifying the Accounting for Measurement-Period Adjustments, which simplifies the accounting for measurement-period adjustments to provisional amounts recognized in a business combination. ASU 2015-16 is effective for fiscal years (and interim reporting periods within those years) beginning after December 15, 2016. The provisions of ASU 2015-16 are not expected to have a material effect on the Company's financial condition, results of operations, or cash flows. In July 2015, the FASB issued ASU No. 2015-11, Simplifying the Measurement of Inventory. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. The Company does not expect adoption of this ASU to have a material impact on the Company's consolidated financial position and results of operations. In April 2015, the FASB issued ASU No. 2015-3, Interest-Imputation of Interest (Subtopic 835-30). This ASU requires debt issuance costs related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of the related debt liability instead of being presented as an asset. The ASU requires retrospective application and represents a change in accounting principle. The ASU is effective for fiscal years beginning after December 15, 2015. Early adoption is permitted for financial statements that have not been previously issued. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements. In January 2015, the FASB issued ASU No. 2015-1, Income Statement - Extraordinary and Unusual Items (Subtopic 225-20). The FASB issued this ASU as part of its initiative to reduce costs and complexity in accounting standards, known as its Simplification Initiative. This ASU eliminates from generally accepted accounting principles in the United States the concept of extraordinary items in an effort to save time and reduce costs, while alleviating uncertainty and maintaining accurate and fulsome disclosure. The amendments in this ASU are effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015. The Company is currently assessing the impact of this ASU but does not expect it to have a material impact on its consolidated financial position and results of operations.   In June 2014, the FASB issued ASU No. 2014-12 which provides guidance on how to account for share-based payment awards where the terms of the award provide that a performance target that affects vesting could be achieved after the requisite service period. This ASU requires a performance target that affects vesting and that could be achieved after the requisite service period be treated as a performance condition. This ASU is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2015, and early adoption is permitted. The Company is currently assessing the impact of this ASU but does not expect it to have a material impact on its consolidated financial position and results of operations. In May 2014, the FASB issued ASU No. 2014-09, Revenue from Contracts with Customers, which supersedes most of the current revenue recognition requirements. The core principle of the new guidance is that an entity should recognize revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for these goods or services. New disclosures about the nature, amount, timing and uncertainty of revenue and cash flows arising from contracts with customers are also required. This guidance is effective for the Company in the first quarter of fiscal year 2018 and early application is not permitted. Entities must adopt the new guidance using one of two retrospective application methods. The Company is currently evaluating the standard and the impact on its financial position and results of operations.

v3.3.1.900

Basis of Presentation (Tables)	3 Months Ended
	Dec. 31, 2015
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Deferred Revenue, by Arrangement, Disclosure	The components of deferred profit are as follows:     December 31, 2015   September 30, 2015   (dollars in thousands) Deferred revenues $ 6,994   $ 7,280 Deferred costs 2,315   2,407 Deferred profit $ 4,679   $ 4,873
Schedule of Inventory, Current	The components of inventories are as follows:     December 31, 2015   September 30, 2015   (dollars in thousands) Purchased parts and raw materials $ 10,950   $ 11,587 Work-in-process 4,314   5,089 Finished goods 6,277   6,653   $ 21,541   $ 23,329
Property, Plant and Equipment	The following is a summary of property, plant and equipment:     December 31, 2015   September 30, 2015   (dollars in thousands) Land, building and leasehold improvements $ 17,904   $ 18,095 Equipment and machinery 9,564   9,709 Furniture and fixtures 5,325   5,465   32,793   33,269 Accumulated depreciation and amortization (15,714 )   (15,508 )   $ 17,079   $ 17,761
Schedule of Goodwill	Solar   Semiconductor   Polishing   Total   (dollars in thousands)    Goodwill $ 6,617   $ 4,463   $ 728   $ 11,808    Accumulated impairment losses (1,273 )   —   —   (1,273 ) Carrying value at September 30, 2015 5,344   4,463   728   10,535 Goodwill recognized due to acquisitions —   600   —   600 Net exchange differences (161 )   —   —   (161 ) Carrying value at December 31, 2015 $ 5,183   $ 5,063   $ 728   $ 10,974                    Goodwill $ 6,413   $ 5,063   $ 728   $ 12,204    Accumulated impairment losses (1,230 )   —   —   (1,230 ) Carrying value at December 31, 2015 $ 5,183   $ 5,063   $ 728   $ 10,974
Schedule of Finite-Lived Intangible Assets	The following is a summary of intangibles:     Useful Life   Gross Carrying Amount Accumulated Amortization Net Carrying Amount   Gross Carrying Amount Accumulated Amortization Net Carrying Amount       December 31, 2015   September 30, 2015       (dollars in thousands) Non-compete agreements 4-8 years   $ 133 $ (133 ) $ —   $ 137 $ (137 ) $ — Customer lists 10 years   2,412 (776 ) 1,636   2,434 (808 ) 1,626 Technology 5-10 years   3,126 (1,526 ) 1,600   3,223 (1,368 ) 1,855 Trade names 10-15 years   1,449 (97 ) 1,352   1,456 (72 ) 1,384 Other 2-10 years   287 (210 ) 77   278 (204 ) 74       $ 7,407 $ (2,742 ) $ 4,665   $ 7,528 $ (2,589 ) $ 4,939
Schedule of Product Warranty Liability	Three Months Ended December 31,   2015   2014   (dollars in thousands) Beginning balance $ 793   $ 628 Warranty expenditures (22 )   (228 ) Warranty provisions/(adjustment) (5 )   307 Ending balance $ 766   $ 707
Effects of share-based compensation expense	Stock-based compensation expense reduced the Company’s results of operations by the following amounts:     Three Months Ended December 31,   2015   2014   (dollars in thousands) Effect on income before income taxes (1) $ (342 )   $ (232 ) Effect on income taxes 48   36 Effect on net income $ (294 )   $ (196 )   (1) Stock-based compensation expense is included in selling, general and administrative expenses.
Schedule of Share-based Compensation, Stock Options, Activity	Stock option transactions and the options outstanding are summarized as follows:     Three months ended December 31,   2015   2014   Options   Weighted Average Exercise Price   Options   Weighted Average Exercise Price Outstanding at beginning of period 1,627,477   $ 9.11   1,063,324   $ 7.37 Granted 344,075   5.25   282,500   9.98 Exercised —   —   —   — Forfeited (33,642 )   14.90   —   — Outstanding at end of period 1,937,910   $ 8.34   1,345,824   $ 7.91                 Exercisable at end of period 1,189,855   $ 9.21   802,703   $ 7.81 Weighted average fair value of options granted during the period $ 3.03       $ 6.09
Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions	The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:     Three months ended December 31,   2015   2014 Risk free interest rate 2%   2% Expected life 6 years   6 years Dividend rate 0%   0% Volatility 62%   67%
Schedule of Share-based Compensation, Restricted Stock Activity	Restricted stock transactions and awards outstanding are summarized as follows:     Three months ended December 31,   2015   2014   Awards   Weighted Average Grant Date Fair Value   Awards   Weighted Average Grant Date Fair Value Beginning Outstanding 13,540   $ 7.98   35,203   $ 10.13 Released (13,540 )   7.98   (21,663 )   11.47 Ending Outstanding —   $ —   13,540   $ 7.98
Research and Development Expense	The table below shows gross research and development expenses and grants earned:     Three Months Ended   December 31, 2015   December 31, 2014   (dollars in thousands) Research, development and engineering $ 2,615   $ 2,573 Grants earned (327 )   (736 )     Net research, development and engineering $ 2,288   $ 1,837

v3.3.1.900

Earnings Per Share (Tables)	3 Months Ended
	Dec. 31, 2015
Earnings Per Share [Abstract]
Schedule of Earnings Per Share, Basic and Diluted	The following table outlines basic and diluted EPS:   Three Months Ended December 31,   2015   2014   (in thousands, except per share amounts) Basic Loss Per Share Computation       Net loss attributable to Amtech Systems, Inc. $ (4,015 )   $ (5,195 ) Weighted Average Shares Outstanding:       Common stock 13,152   9,854 Basic loss per share attributable to Amtech shareholders $ (0.31 )   $ (0.53 ) Diluted Loss Per Share Computation       Net loss attributable to Amtech Systems, Inc. $ (4,015 )   $ (5,195 ) Weighted Average Shares Outstanding:       Common stock 13,152   9,854 Common stock equivalents (1) —   — Diluted shares 13,152   9,854 Diluted loss per share attributable to Amtech shareholders $ (0.31 )   $ (0.53 ) (1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

v3.3.1.900

Business Segment Information (Tables)	3 Months Ended
	Dec. 31, 2015
Segment Reporting [Abstract]
Schedule of Segment Reporting Information, by Segment	Information concerning our business segments is as follows:   Three months ended December 31,   2015   2014   (dollars in thousands) Net Revenues:       Solar (1)* $ 9,543   $ 8,286 Semiconductor 10,700   732 Polishing 1,831   3,378   $ 22,074   $ 12,396 Operating income (loss):       Solar (1)* $ (1,864 )   $ (2,495 ) Semiconductor (160 )   (100 ) Polishing 169   742 Non-segment related (2,074 )   (2,940 )   $ (3,929 )   $ (4,793 ) (1) * The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than 25% of the Solar segment revenue.   December 31, 2015   September 30, 2015   (dollars in thousands) Identifiable Assets:       Solar $ 40,229   $ 45,717 Semiconductor 46,303   46,912 Polishing 5,395   5,793 Non-segment related 21,468   27,034   $ 113,395   $ 125,456

v3.3.1.900

Major Customers and Foreign Sales (Tables)	3 Months Ended
	Dec. 31, 2015
Major Customers and Foreign Sales [Abstract]
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area	Three months ended December 31,   2015   2014 United States 28 %   23 % Other 3 %   — % Total North America 31 %   23 %         China 20 %   26 % Taiwan 13 %   19 % Other 21 %   6 % Total Asia 54 %   51 % Germany 2 %   10 % Other 13 %   16 % Total Europe 15 %   26 %   100 %   100 %

v3.3.1.900

Basis of Presentation - Deferred Profit (Details) $ in Thousands	Dec. 31, 2015 USD ($) systems equipment	Sep. 30, 2015 USD ($)
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Number of similarly configured systems and processes | systems	2
Number of similarly configured items of equipment | equipment	2
Deferred revenues	$ 6,994	$ 7,280
Deferred costs	2,315	2,407
Deferred profit	$ 4,679	$ 4,873

v3.3.1.900

Basis of Presentation - Concentrations of Credit Risk (Details) - Customer	3 Months Ended	12 Months Ended
	Dec. 31, 2015	Sep. 30, 2015
Accounts Receivable | Customer Concentration Risk
Concentration Risk [Line Items]
Concentration risk, percentage	10.00%
Number of customers	0	0
UNITED STATES | Cash and Cash Equivalents and Restricted Cash
Concentration Risk [Line Items]
Concentration risk, percentage	80.00%

v3.3.1.900

Basis of Presentation - Restricted Cash (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Sep. 30, 2015
Other Commitments [Line Items]
Restricted cash	$ 847	$ 638
Environmental Restoration Costs | Superfund Site
Other Commitments [Line Items]
Restricted cash	$ 200	$ 200

v3.3.1.900

Basis of Presentation - Inventories (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Sep. 30, 2015
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Percentage of weighted average cost inventory	60.00%	60.00%
Inventory, Net [Abstract]
Purchased parts and raw materials	$ 10,950	$ 11,587
Work-in-process	4,314	5,089
Finished goods	6,277	6,653
Inventory	$ 21,541	$ 23,329

v3.3.1.900

Basis of Presentation - Property, Plant and Equipment (Details) - USD ($) $ in Thousands	3 Months Ended
	Dec. 31, 2015	Sep. 30, 2015
Property, Plant and Equipment [Line Items]
Property, plant and equipment, gross	$ 32,793	$ 33,269
Accumulated depreciation and amortization	(15,714)	(15,508)
Property, plant and equipment - net	$ 17,079	17,761
Building | Minimum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	20 years
Building | Maximum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	30 years
Land, building and leasehold improvements
Property, Plant and Equipment [Line Items]
Property, plant and equipment, gross	$ 17,904	18,095
Equipment and machinery
Property, Plant and Equipment [Line Items]
Property, plant and equipment, gross	$ 9,564	9,709
Equipment and machinery | Minimum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	3 years
Equipment and machinery | Maximum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	7 years
Furniture and fixtures
Property, Plant and Equipment [Line Items]
Property, plant and equipment, gross	$ 5,325	$ 5,465
Furniture and fixtures | Minimum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	5 years
Furniture and fixtures | Maximum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	10 years
Leasehold Improvements | Minimum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	3 years
Leasehold Improvements | Maximum
Property, Plant and Equipment [Line Items]
Property, plant and equipment, useful life (in years)	7 years

v3.3.1.900

Basis of Presentation - Goodwill (Details) $ in Thousands	3 Months Ended
	Dec. 31, 2015 USD ($)
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	$ 11,808
Goodwill, impaired, accumulated impairment loss, beginning of year	(1,273)
Goodwill, net, beginning of year	10,535
Goodwill, Acquired During Period	600
Change in foreign exchange rates	(161)
Goodwill, gross, end of quarter	12,204
Goodwill, impaired, accumulated impairment loss, end of quarter	(1,230)
Goodwill, net, end of quarter	10,974
Solar (1)
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	6,617
Goodwill, impaired, accumulated impairment loss, beginning of year	(1,273)
Goodwill, net, beginning of year	5,344
Goodwill, Acquired During Period	0
Change in foreign exchange rates	(161)
Goodwill, gross, end of quarter	6,413
Goodwill, impaired, accumulated impairment loss, end of quarter	(1,230)
Goodwill, net, end of quarter	5,183
Semiconductor
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	4,463
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	4,463
Goodwill, Acquired During Period	600
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	5,063
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	5,063
Polishing
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	728
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	728
Goodwill, Acquired During Period	0
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	728
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	$ 728

v3.3.1.900

Basis of Presentation - Intangibles (Details) - USD ($) $ in Thousands	3 Months Ended
	Dec. 31, 2015	Sep. 30, 2015
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Gross Carrying Amount	$ 7,407	$ 7,528
Accumulated Amortization	(2,742)	(2,589)
Net Carrying Amount	4,665	4,939
Non-compete agreements
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Gross Carrying Amount	133	137
Accumulated Amortization	(133)	(137)
Net Carrying Amount	$ 0	0
Non-compete agreements | Minimum
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Useful Life (in years)	4 years
Non-compete agreements | Maximum
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Useful Life (in years)	8 years
Customer lists
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Gross Carrying Amount	$ 2,412	2,434
Accumulated Amortization	(776)	(808)
Net Carrying Amount	$ 1,636	1,626
Useful Life (in years)	10 years
Technology
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Gross Carrying Amount	$ 3,126	3,223
Accumulated Amortization	(1,526)	(1,368)
Net Carrying Amount	$ 1,600	1,855
Technology | Minimum
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Useful Life (in years)	5 years
Technology | Maximum
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Useful Life (in years)	10 years
In-process research and development
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Useful Life (in years)	5 years
Trade names
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Gross Carrying Amount	$ 1,449	1,456
Accumulated Amortization	(97)	(72)
Net Carrying Amount	$ 1,352	1,384
Useful Life (in years)	15 years
Other
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Gross Carrying Amount	$ 287	278
Accumulated Amortization	(210)	(204)
Net Carrying Amount	$ 77	$ 74
Other | Minimum
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Useful Life (in years)	2 years
Other | Maximum
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]
Useful Life (in years)	12 years

v3.3.1.900

Basis of Presentation - Warranty (Details) - USD ($) $ in Thousands	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Movement in Standard Product Warranty Accrual [Roll Forward]
Beginning balance	$ 793	$ 628
Warranty expenditures	(22)	(228)
Warranty provisions/(adjustment)	(5)	307
Ending balance	$ 766	$ 707
Minimum
Product Warranty [Line Items]
Standard product warranty, period (in months)	12 months
Maximum
Product Warranty [Line Items]
Standard product warranty, period (in months)	24 months

v3.3.1.900

Basis of Presentation - Stock-Based Compensation (Details) - USD ($) $ / shares in Units, $ in Thousands	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Effect on income before income taxes	$ (342)	$ (232)
Effect on income taxes	48	36
Effect on net income	$ (294)	$ (196)
Restricted Stock
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]
Beginning Outstanding (in shares)	13,540	35,203
Released (in shares)	(13,540)	(21,663)
Ending Outstanding (in shares)	0	13,540
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Roll Forward]
Beginning Outstanding, Weighted Average Grant Date Fair Value (usd per share)	$ 7.98	$ 10.13
Released, Weighted Average Grant Date Fair Value (usd per share)	7.98	11.47
Ending Outstanding, Weighted Average Grant Date Fair Value (usd per share)	$ 0.00	$ 7.98
Restricted Stock | Maximum
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Option vesting period (in years)	4 years
Restricted Stock | Minimum
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Option vesting period (in years)	2 years
Stock Options
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]
Outstanding at beginning of period (in shares)	1,627,477	1,063,324
Granted (in shares)	344,075	282,500
Exercised (in shares)	0	0
Forfeited (in shares)	(33,642)	0
Outstanding at end of period (in shares)	1,937,910	1,345,824
Exercisable at end of period (in shares)	1,189,855	802,703
Weighted average fair value of options granted during the period (usd per share)	$ 3.03	$ 6.09
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Roll Forward]
Outstanding at beginning of period, Weighted Average Exercise Price (usd per share)	9.11	7.37
Granted, Weighted Average Exercise Price (usd per share)	5.25	9.98
Exercised, Weighted Average Exercise Price (usd per share)	0.00	0.00
Forfeited, Weighted Average Exercise Price (usd per share)	14.90	0.00
Outstanding at end of period, Weighted Average Exercise Price (usd per share)	8.34	7.91
Exercisable at end of period, Weighted Average Exercise Price (usd per share)	$ 9.21	$ 7.81
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]
Risk free interest rate	2.00%	2.00%
Expected life	6 years	6 years
Dividend rate	0.00%	0.00%
Volatility	62.00%	67.00%
Stock Options | Maximum
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Option expiration period (in years)	10 years
Option vesting period (in years)	4 years
Stock Options | Minimum
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Option vesting period (in years)	6 months

v3.3.1.900

Basis of Presentation - Shipping Expense (Details) - USD ($) $ in Millions	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Shipping expenses	$ 0.4	$ 0.2

v3.3.1.900

Basis of Presentation - Research and Development Expense (Details) - USD ($) $ in Thousands	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Research, development and engineering	$ 2,615	$ 2,573
Grants earned	(327)	(736)
Net research, development and engineering	$ 2,288	$ 1,837

v3.3.1.900

Income Taxes (Details) - USD ($) $ in Millions	3 Months Ended
	Dec. 31, 2015	Sep. 30, 2015
Income Tax Contingency [Line Items]
Valuation allowance increase	$ 0.7
Unrecognized tax benefits that would impact effective tax rate	1.8	$ 1.8
Unrecognized tax benefits, income tax penalties and interest accrued	$ 1.9	$ 1.8
Minimum
Income Tax Contingency [Line Items]
Number of years open for tax examinations	3 years
Maximum
Income Tax Contingency [Line Items]
Number of years open for tax examinations	5 years

v3.3.1.900

Earnings Per Share (Details) - USD ($) $ / shares in Units, $ in Thousands	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]
Net income (loss) attributable to Amtech Systems, Inc.	$ (4,015)	$ (5,195)
Weighted average shares outstanding (in shares)	13,152,000	9,854,000
Basic income (loss) per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ (0.53)
Common stock equivalents (in shares)	0	0
Diluted shares (in shares)	13,152,000	9,854,000
Diluted income (loss) per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ (0.53)
Stock Options
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]
Antidilutive securities excluded from computation of earnings per share, amount	1,938,000	1,346,000
Restricted Stock
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]
Antidilutive securities excluded from computation of earnings per share, amount		14,000

v3.3.1.900

Stockholders' Equity (Details) - $ / shares			3 Months Ended
	Oct. 08, 2015	Dec. 15, 2008	Dec. 31, 2015	Sep. 30, 2015	Dec. 31, 2014
Class of Stock [Line Items]
Common stock, par value			$ 0.01	$ 0.01
Minimum percent ownership of common stock for exercise of rights			15.00%
Series A Preferred Stock
Class of Stock [Line Items]
Common stock, par value		$ 0.01
Class of warrant or right, number of securities called by warrants or rights					0.001
Exercise price of rights		$ 51.60
Rights expiration period		10 years
Collective ownership threshold for joint filers	19.90%

v3.3.1.900

Business Segment Information (Details) $ in Thousands	3 Months Ended
	Dec. 31, 2015 USD ($) segment	Dec. 31, 2014 USD ($)	Sep. 30, 2015 USD ($)	Dec. 24, 2014
Segment Reporting Information [Line Items]
Number of business segments | segment	3
Net Revenues	$ 22,074	$ 12,396
Operating Income (Loss)	(3,929)	(4,793)
Identifiable Assets	113,395		$ 125,456
Solar (1)
Segment Reporting Information [Line Items]
Net Revenues	9,543	8,286
Operating Income (Loss)	(1,864)	(2,495)
Identifiable Assets	40,229		45,717
Semiconductor
Segment Reporting Information [Line Items]
Net Revenues	10,700	732
Operating Income (Loss)	(160)	(100)
Identifiable Assets	46,303		46,912
Polishing
Segment Reporting Information [Line Items]
Net Revenues	1,831	3,378
Operating Income (Loss)	169	742
Identifiable Assets	5,395		5,793
Non-segment related
Segment Reporting Information [Line Items]
Operating Income (Loss)	(2,074)	$ (2,940)
Identifiable Assets	$ 21,468		$ 27,034
Product Concentration Risk | Sales Revenue, Product Line | Semiconductor
Segment Reporting Information [Line Items]
Concentration risk, percentage (less than 25%)	25.00%
SoLayTec, B.V.
Segment Reporting Information [Line Items]
Percentage of voting interests acquired				51.00%

v3.3.1.900

Major Customers and Foreign Sales (Details) - Customer	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Revenue, Major Customer [Line Items]
Revenue, number of major customers	1	2
Revenues, percentage	100.00%	100.00%
United States
Revenue, Major Customer [Line Items]
Revenues, percentage	28.00%	23.00%
Other
Revenue, Major Customer [Line Items]
Revenues, percentage	3.00%	0.00%
Total North America
Revenue, Major Customer [Line Items]
Revenues, percentage	31.00%	23.00%
China
Revenue, Major Customer [Line Items]
Revenues, percentage	20.00%	26.00%
Taiwan
Revenue, Major Customer [Line Items]
Revenues, percentage	13.00%	19.00%
Other
Revenue, Major Customer [Line Items]
Revenues, percentage	21.00%	6.00%
Total Asia
Revenue, Major Customer [Line Items]
Revenues, percentage	54.00%	51.00%
Germany
Revenue, Major Customer [Line Items]
Revenues, percentage	2.00%	10.00%
Other
Revenue, Major Customer [Line Items]
Revenues, percentage	13.00%	16.00%
Total Europe
Revenue, Major Customer [Line Items]
Revenues, percentage	15.00%	26.00%
Net Revenues | Customer Concentration Risk | Customer Number One
Revenue, Major Customer [Line Items]
Concentration risk, percentage	14.00%	12.00%
Net Revenues | Customer Concentration Risk | Customer Number Two
Revenue, Major Customer [Line Items]
Concentration risk, percentage		11.00%

v3.3.1.900

Long-term Debt (Details) - USD ($) $ in Thousands	3 Months Ended
	Dec. 31, 2015	Sep. 30, 2015	Jan. 30, 2015
Debt Instrument [Line Items]
Current maturities of long-term debt	$ 822	$ 919
BTU International, Inc (BTU) Merger
Debt Instrument [Line Items]
Long-term debt acquired			$ 7,200
SoLayTec, B.V.
Debt Instrument [Line Items]
Long-term debt	3,200
Proceeds from issuance of debt	$ 800
SoLayTec, B.V. | Minimum
Debt Instrument [Line Items]
Interest rate	5.95%
SoLayTec, B.V. | Maximum
Debt Instrument [Line Items]
Interest rate	10.00%
Mortgage Note
Debt Instrument [Line Items]
Debt covenant, outstanding principal plus accrued interest percent of appraised value, maximum threshold	80.00%
Current maturities of long-term debt	$ 100
Mortgage Note | BTU International, Inc (BTU) Merger
Debt Instrument [Line Items]
Long-term debt	$ 6,800
Interest rate			4.40%
Federal Home Loan Board Five Year Classic Advance Rate | Mortgage Note
Debt Instrument [Line Items]
Basis spread on variable rate	240.00%

v3.3.1.900

Commitments and Contingencies (Details)	3 Months Ended		12 Months Ended
	Dec. 31, 2015 USD ($) claims	Dec. 31, 2014 USD ($)	Sep. 30, 2014 USD ($)	Sep. 30, 2015 USD ($)	Jan. 30, 2015 USD ($)
Schedule of Equity Method Investments [Line Items]
Purchase obligation	$ 7,200,000			$ 9,800,000
Price of an ion implanter	$ 108,000	$ 155,000
Kingstone Holding Company
Schedule of Equity Method Investments [Line Items]
Equity method investment, ownership percentage	15.00%
Tempress Systems and Energy Research Centre Agreement [Member]
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter			$ 1,400,000
Ownership rights to results of projects developed separately by individual parties			100.00%
R&D Agreement term			4 years
Required contribution in form of labor and assets			$ 1,400,000
Amount contributed	$ 900,000
R&D, required contribution	1,400,000
Number of years from agreement start for contribution for project support			2 years
Environmental Clean-up | BTU International, Inc (BTU) Merger
Schedule of Equity Method Investments [Line Items]
Loss contingency accrual					$ 100,000
Letter of credit	$ 200,000
Stockholder Actions (Putative Stockholder Class Action Complaints) | Settled Litigation
Schedule of Equity Method Investments [Line Items]
Number of settled claims | claims	2
Estimate of possible loss	$ 325,000

v3.3.1.900

Investments (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Dec. 31, 2015	Sep. 30, 2014	Sep. 30, 2015
Schedule of Equity Method Investments [Line Items]
Investments	$ 2,716		$ 2,733
Equity losses	$ 17	$ 0
Kingstone Holding Company
Schedule of Equity Method Investments [Line Items]
Equity method investment, ownership percentage	15.00%
Investments	$ 2,700
Equity losses	$ 100
Shanghai Operating Entity
Schedule of Equity Method Investments [Line Items]
Equity method investment, ownership percentage	10.00%

v3.3.1.900

Acquisitions (Details) $ in Thousands	Jan. 30, 2015 USD ($) shares	Dec. 24, 2014 USD ($)	Dec. 31, 2015 USD ($)	Sep. 30, 2015 USD ($)
Business Acquisition [Line Items]
Goodwill			$ 10,974	$ 10,535
SoLayTec, B.V.
Business Acquisition [Line Items]
Percentage of voting interests acquired		51.00%
Total purchase price consideration		$ 1,900
Goodwill		3,200
Identifiable intangible assets		$ 2,000
Parent Company | Merger Agreement
Business Acquisition [Line Items]
Conversion ratio, shares of stock exchanged per each share of subsidiary stock	0.3291
BTU International, Inc (BTU) Merger | Merger Agreement
Business Acquisition [Line Items]
Goodwill	$ 5,100
Identifiable intangible assets	$ 2,900
Conversion of stock, shares issued | shares	3,185,852

v3.3.1.900

Related Party Transactions (Details) - USD ($) $ in Millions	Dec. 31, 2015	Sep. 30, 2015
Kingstone Holding Company
Related Party Transaction [Line Items]
Equity method investment, ownership percentage	15.00%
Kingstone Holding Company | Kingstone Hong Kong
Related Party Transaction [Line Items]
Equity method investment, ownership percentage		15.00%
Shanghai Operating Entity
Related Party Transaction [Line Items]
Equity method investment, ownership percentage	10.00%
Shanghai Operating Entity | Kingstone Hong Kong
Related Party Transaction [Line Items]
Equity method investment, ownership percentage		10.00%
Accounts Receivable | Kingstone Hong Kong
Related Party Transaction [Line Items]
Due from related parties	$ 0.5
Exclusive Sales And Service Rights In Solar Ion Implant Equipment | Kingstone Hong Kong
Related Party Transaction [Line Items]
Deconsolidation, amount to be received	$ 2.2

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