Axcelis Announces Multi System 'Purion XE' High Energy Implanter Order from New Purion Logic Customer

BEVERLY, Mass., March 10, 2015 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received an order for multiple 200mm Purion XE™ single wafer, high energy implanters. The systems will support capacity expansions at logic fabs in Europe and the Asia Pacific Region, and will be used in high volume production of Bipolar-CMOS-DMOS (BCD) devices for the automotive market.  The systems are scheduled to ship in the third quarter.

John Aldeborgh, executive vice president, customer operations, said, "We're pleased to support this chipmaker as it makes the transition from multi wafer to single wafer technology to increase capacity to support the growing demand for BCD devices. The Purion was chosen because of its ability to provide dramatically higher productivity and reliability in high volume production. It will be a strong complement to this customer's manufacturing process, providing the most flexible and efficient high energy implant capability available." He continued, "The BCD market is a great example of the relentless innovation that is the hallmark of the semiconductor industry. It integrates three distinct technologies on a single die, including analog, digital and power, to significantly reduce costs and optimize capital efficiency."

The Purion Platform

The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, we've built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for your fab. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266  Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.